基于微机电系统的微型气相色谱柱研究进展

doi:10.3724/SP.J.1123.2018.02015

色谱 ›› 2018, Vol. 36 ›› Issue (8): 707-715.DOI: 10.3724/SP.J.1123.2018.02015

基于微机电系统的微型气相色谱柱研究进展

罗凡^1,2, 冯飞¹, 赵斌¹, 田博文^1,2, 杨雪蕾^1,2, 周海梅¹, 李昕欣¹

1. 中国科学院上海微系统与信息技术研究所, 上海 200050;
2. 中国科学院大学, 北京 100049

收稿日期:2018-02-08 出版日期:2018-08-08 发布日期:2014-06-28
通讯作者: 冯飞,Tel:(021)62511070-5473,E-mail:fengfei507@mail.sim.ac.cn
基金资助:
国家自然科学基金项目（91323304，60876081，61172151）；上海市科委项目（14DZ1105102）；国家高技术研究发展"863"计划项目（2009AA04Z317）；国家重点研发计划（2018YFA0208504）.

Research progress of micro-electro-mechanical systems micro gas chromatography columns

LUO Fan^1,2, FENG Fei¹, ZHAO Bin¹, TIAN Bowen^1,2, YANG Xuelei^1,2, ZHOU Haimei¹, LI Xinxin¹

1. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
2. University of Chinese Academy of Sciences, Beijing 100049, China

Received:2018-02-08 Online:2018-08-08 Published:2014-06-28
Supported by:
National Natural Science Foundation of China (Nos.91323304, 60876081, 61172151);Science and Technology Commission of Shanghai Municipality (No.14DZ1105102);National High Technology Research and Development Program of China (863 Program)(No.2009AA04Z317);National Key Research&Development Program of China (No.2018YFA0208504).

摘要/Abstract

摘要：

气相色谱柱是气相色谱仪的关键部件，主要用于混合气体组分的分离。与传统气相色谱柱相比，基于微机电系统（MEMS）技术设计制作的微型气相色谱柱具有重量轻、体积小、功耗低、分离快速等优点，便于集成到便携式气相色谱仪中，适应了目前气相色谱仪微型化的发展趋势。该文综述了MEMS微型气相色谱柱的研究进展，首先阐述了MEMS微型气相色谱柱理论基础，随后对MEMS微型气相色谱柱沟道布局及柱内结构、固定相支撑层及固定相制备等方面进行了综述，最后对其发展趋势进行了展望。

关键词: 微机电系统, 微型气相色谱柱, 综述

Abstract:

The gas chromatography (GC) column is a key component of the gas chromatographic system, which is mainly used for the separation of mixed gas components. Compared with the traditional GC column, the micro GC column based on micro-electro-mechanical systems (MEMS) technology has the advantages of lighter weight, smaller volume, lower power consumption, and faster analysis. Furthermore, it can be integrated into a portable instrument, such as a miniaturized GC. The research progress of micro GC columns based on MEMS technology is summarized in this paper. First, the theoretical basis of the MEMS micro GC column is stated. Then, the layout and inner structure of the MEMS micro GC column, the stationary-phase support, and the preparation of the stationary phase are summarized. Finally, trends in the development of MEMS micro GC columns are discussed.

Key words: micro gas chromatography column, micro-electro-mechanical systems (MEMS), review

中图分类号:

O658

罗凡, 冯飞, 赵斌, 田博文, 杨雪蕾, 周海梅, 李昕欣. 基于微机电系统的微型气相色谱柱研究进展[J]. 色谱, 2018, 36(8): 707-715.

LUO Fan, FENG Fei, ZHAO Bin, TIAN Bowen, YANG Xuelei, ZHOU Haimei, LI Xinxin. Research progress of micro-electro-mechanical systems micro gas chromatography columns[J]. Chinese Journal of Chromatography, 2018, 36(8): 707-715.

参考文献

[1] Martin A J P, Synge R L M. Biochem J, 1941, 35(12):1358
[2] Van Deemter J J, Zuiderweg F J, Klinkenberg A. Chem Eng Sci, 1956, 5(6):271
[3] Golay M J E. Gas Chromatography, New York:Academic Press, 1958
[4] Akbar M, Shakeel H, Agah M//Sirvio S, et al. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway:IEEE Press, 2015:771
[5] Terry S C, Jerman J H, Angell J B. IEEE Trans Electron Devices, 1979, 26(12):1880
[6] Noh H, Hesketh P J, Frye-Mason G C. J Microelectromech Syst, 2002, 11(6):718
[7] Bhushan A, Yemane D, McDaniel S, et al. Analyst, 2010, 135(10):2730
[8] Lu C J, Steinecker W H, Tian W C, et al. Lab Chip, 2005, 5(10):1123
[9] Lambertus G, Elstro A, Sensenig K, et al. Anal Chem, 2004, 76(9):2629
[10] Potkay J A, Lambertus G R, Sacks R D, et al. J Microelectromech Syst, 2007, 16(5):1071
[11] Casals O, Romano-Rodríguez A, Illa X, et al//Becker T, et al. Smart Sensors, Actuators, and MEMS Ⅲ. International Society for Optics and Photonics, Vol 6589. Bellingham:SPIE Press, 2007:65891A
[12] Raut R P, Thurbide K B. Chromatographia, 2017, 80(5):805
[13] Hou L, Feng F, You W, et al. J Chromatogr A, 2018, 1552:73
[14] Li Y, Du X, Wang Y, et al. RSC Adv, 2014, 4(8):3742
[15] Li Y, Zhang R, Wang T, et al. Chemosphere, 2016, 158:154
[16] Bhushan A, Yemane D, Trudell D, et al. Microsyst Technol, 2007, 13(3/4):361
[17] Pai R S, Mott D R, Stepnowski J L, et al//Lennart L, et al. 2008 IEEE Conference on Technologies for Homeland Security. Piscataway:IEEE Press, 2008:150
[18] Stadermann M, McBrady A D, Dick B, et al. Anal Chem, 2006, 78(16):5639
[19] Radadia A D, Salehi-Khojin A, Masel R I, et al. Sens Actuat B-Chem, 2010, 150(1):456
[20] Radadia A D, Salehi-Khojin A, Masel R I, et al. J Micromech Microeng, 2010, 20(1):015002
[21] Sturmann J, Junge S, Benecke W, et al//Hosticka B J, et al. The Sixteenth Annual International Conference on Micro Electro Mechanical Systems. Piscataway:IEEE Press, 2003:399
[22] Zampolli S, Elmi I, Stürmann J, et al. Sens Actuat B-Chem, 2005, 105(2):400
[23] Sun J H, Guan F Y, Zhu X F, et al. J Chromatogr A, 2016, 1429:311
[24] Ali S, Ashraf-Khorassani M, Taylor L T, et al. Sens Actuat B-Chem, 2009, 141(1):309
[25] Sun J H, Cui D, Chen X, et al. J Chromatogr A, 2013, 1291:122
[26] Tian B, Feng F, Hou L, et al//Anuradha S, et al. IEEE 30th International Conference on Micro Electro Mechanical Systems. Piscataway:IEEE Press, 2017:1343
[27] Akbar M, Shakeel H, Agah M. Lab Chip, 2015, 15(7):1748
[28] Azzouz I, Vial J, Thiébaut D, et al. Anal Bioanal Chem, 2014, 406(4):981
[29] Li Y, Zhang R, Wang T, et al. Talanta, 2016, 154:99
[30] Shakeel H, Wang D, Heflin J R, et al. Sens Actuat B-Chem, 2015, 216:349
[31] Yuan H, Du X, Tai H, et al. Sens Actuat B-Chem, 2017, 239:304
[32] Yuan H, Du X, Li Y, et al//Bhuyan M S, et al. IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). Piscataway:IEEE Press, 2016:283
[33] Shakeel H, Agah M. Sens Actuat B-Chem, 2017, 242:215
[34] Sidelnikov V N, Nikolaeva O A, Platonov I A, et al. Russ Chem Rev, 2016, 85(10):1033
[35] Chan R, Lopez A, Regmi B P, et al//Yu C L, et al. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Piscataway:IEEE Press, 2017:1528
[36] Haghighi F, Talebpour Z, Sanati-Nezhad A. Lab Chip, 2015, 15(12):2559
[37] Regmi B P, Chan R, Agah M. J Chromatogr A, 2017, 1510:66
[38] Azzouz I, Marty F, Bourouina T//Cavicchi R E, et al. 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP). Piscataway:IEEE Press, 2017:1
[39] Li Y, Du X S, Gao C, et al. Transducer and Microsystem Technologies, 2014, 33(9):32 李臆, 杜晓松, 高超, 等. 传感器与微系统, 2014, 33(9):32
[40] Wang T.[MS Dissertation]. Hangzhou:Zhejiang University, 2016 王涛.[硕士学位论文]. 杭州:浙江大学, 2016
[41] Li Y.[PhD Dissertation]. Chendu:University of Electronic Science and Technology of China, 2014 李臆.[博士学位论文]. 成都:电子科技大学, 2014
[42] Guan Y F, Wang J W, Duan C H, Chinese Journal of Chromatography, 2009, 27(5):592 关亚风, 王建伟, 段春凤. 色谱, 2009, 27(5):592
[43] Wang D, Shakeel H, Lovette J, et al. Anal Chem, 2013, 85(17):8135
[44] Shakeel H, Rice G W, Agah M. Sens Actuat B-Chem, 2014, 203:641
[45] Romero A A, Alba M D, Zhou W, et al. J Phys Chem B, 1997, 101(27):5294
[46] Zhao D Y, Wan Y, Zhou W Z. Ordered Mesoporous Molecular Sieve Materials. Beijing:Higher Education Press, 2013 赵东元, 万颖, 周午纵. 有序介孔分子筛材料. 北京:高等教育出版社, 2013
[47] Cassiers K, Linssen T, Mathieu M, et al. Chem Mat, 2002, 14(5):2317
[48] Galarneau A, Desplantier-Giscard D, Di Renzo F, et al. Catal Today, 2001, 68(1/3):191
[49] Luo F, Feng F, Hou L, et al//Anuradha S, et al. IEEE 30th International Conference on Micro Electro Mechanical Systems. Piscataway:IEEE Press, 2017:1071
[50] Reidy S, Lambertus G, Reece J, et al. Anal Chem, 2006, 78(8):2623
[51] Vial J, Thiébaut D, Marty F, et al. J Chromatogr A, 2011, 1218(21):3262
[52] Reid V R, Stadermann M, Bakajin O, et al. Talanta, 2009, 77(4):1420

基于微机电系统的微型气相色谱柱研究进展

Research progress of micro-electro-mechanical systems micro gas chromatography columns

PDF

可视化

摘要/Abstract

引用本文

使用本文

扫码分享

参考文献

相关文章 15

编辑推荐

Metrics

[1]	周然锋, 张惠贤, 尹小丽, 彭西甜. 新型纳米材料在农产品安全分析中的应用进展[J]. 色谱, 2023, 41(9): 731-741.
[2]	解伟亚, 朱晓晗, 梅宏成, 郭洪玲, 李亚军, 黄阳, 秦皓, 朱军, 胡灿. 基于功能材料的固相微萃取技术及其在法庭科学领域中的应用[J]. 色谱, 2023, 41(4): 302-311.
[3]	欧阳艺兰, 易琳, 邱露允, 张真庆. 色谱技术在肝素结构分析中的研究进展[J]. 色谱, 2023, 41(2): 107-121.
[4]	翟洪稳, 马红玉, 曹梅荣, 张明星, 马俊美, 张岩, 李强. 在线样品制备技术耦合液相色谱-质谱系统在食品危害物检测中的应用进展[J]. 色谱, 2023, 41(12): 1062-1072.
[5]	余涛, 陈立, 张文敏, 张兰, 卢巧梅. 微孔有机网络材料的合成方法及其在样品前处理中的应用进展[J]. 色谱, 2023, 41(12): 1052-1061.
[6]	王国秀, 陈永雷, 吕文娟, 陈宏丽, 陈兴国. 共价有机框架材料在毛细管电色谱中的应用进展[J]. 色谱, 2023, 41(10): 835-842.
[7]	闫美婷, 龙文雯, 陶雪平, 王丹, 夏之宁, 付琦峰. 金属有机骨架材料在色谱固定相构建及应用中的研究进展[J]. 色谱, 2023, 41(10): 879-890.
[8]	宋春颖, 金高娃, 俞东萍, 夏东海, 丰静, 郭志谋, 梁鑫淼. 超临界流体色谱固定相的发展及在天然产物中的应用[J]. 色谱, 2023, 41(10): 866-878.
[9]	蒋文倩, 陈宇媚, 毕文韬. 基于低共熔溶剂的多孔有机框架材料合成及其在固相萃取中的应用[J]. 色谱, 2023, 41(10): 901-910.
[10]	杨涵, 汤雯淇, 曾楚, 孟莎莎, 徐铭. 高效金属有机骨架气相色谱固定相的理性设计[J]. 色谱, 2023, 41(10): 853-865.
[11]	邹晓伟, 刘星, 张建明. 薄层色谱与质谱联用的研究进展[J]. 色谱, 2023, 41(1): 24-36.
[12]	玛依热·阿不力提甫, 钟子豪, 白希. 制备气相色谱在挥发性成分分离中的应用研究进展[J]. 色谱, 2023, 41(1): 37-46.
[13]	翟容容, 高雯, 李梦宁, 杨华. 离子淌度质谱技术在中药化学成分分析中的研究进展[J]. 色谱, 2022, 40(9): 782-787.
[14]	鲁晨辉, 张毅, 苏宇杰, 王文龙, 冯永巍. 食品中芳香族氨基酸的分离分析技术研究进展[J]. 色谱, 2022, 40(8): 686-693.
[15]	张文敏, 刘冠城, 马文德, 方敏, 张兰. 共价有机骨架材料在有毒有害物质萃取中的应用进展[J]. 色谱, 2022, 40(7): 600-609.