离子色谱法测定蚀刻槽废氢氟酸中的六氟硅酸
霍世欣, 罗全迁, 曹琳
Determination of hexafluorosilicic acid in the wasted hydrofluoric acid in the etching bath solution with ion chromatography
HUO Shixin, LUO Quanqian, CAO Lin
色谱
.
2016, (10): 982
-985
.
DOI: 10.3724/SP.J.1123.2016.05021
