色谱

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提升等离子体放电检测效率的仿真设计及实验验证

张正一, 卜芳*, 关雷, 王铁斌, 李飞   

  1. 北京航天计量测试技术研究所, 北京 100076
  • 收稿日期:2026-07-22
  • 通讯作者: * E-mail:Fangbu2017@163.com.
  • 基金资助:
    工业和信息化部高质量专项(2023ZY01026).

Simulation design and experimental validation for improving plasma discharge detection efficiency

ZHANG Zhengyi, BU Fang*, GUAN Lei, WANG Tiebin, LI Fei   

  1. Beijing Aerospace Institute for Metrology and Measurement Technology, Beijing 100076, China
  • Received:2026-07-22
  • Supported by:
    The High-Quality Development Special Project of the Ministry of Industry and Information Technology (No. 2023ZY01026).

摘要: 痕量气体浓度的准确定量测定在高端制造、航空航天、半导体及高纯气体分析等领域具有重要意义。目前,大部分气体检测原理均基于对气体离子化后的离子信号进行测量,包括质谱、氢火焰离子化检测器(FID)以及放电离子化检测等。稳定且均匀的信号收集电场是实现高灵敏度和高精度检测的重要基础。本文提出一种基于双极偏压电场结构的离子化检测优化方法,针对典型的脉冲放电离子化检测方式,对离子输运过程与信号检测性能进行优化验证。开展了双极偏压电场仿真设计,通过COMSOL Multiphysics软件分析不同偏压条件下轴向电势的分布规律。在此基础上,利用5 μmol/mol甲烷标准气对仿真结果进行了实验验证,考察不同偏压组合对检测器响应、信噪比和检出限的影响。结果表明,双极偏压能够改善检测区域内的电势分布,提高离子的轴向输运能力,从而增强离子收集效率。此检测系统存在较宽的最佳工作区间,当双极偏压均处于100~200 V范围内时,可同时获得较低检出限和较高信噪比,其中最低检出限达到2.50 nmol/mol,最大信噪比达到4 004.8。研究结果验证了双极偏压结构可有效提高离子的收集效率和检测灵敏度,可为离子化检测系统的电场优化提供参考。

关键词: 离子化检测, 痕量气体检测, 气相色谱, 双极偏压

Abstract: Accurate quantitative measurement of trace gas concentrations is of critical importance in high-end manufacturing, aerospace, semiconductor fabrication, and high-purity gas analysis. In these fields, even minute impurities can significantly affect product quality, process stability, and device performance. This drives the continuous demand for highly sensitive and reliable gas detection techniques. Most gas detection methods are based on the measurement of ion signals generated after gas ionization. Common techniques include mass spectrometry, flame ionization detection (FID), and discharge ionization detection. Among them, discharge ionization detection has attracted considerable attention because of its simple operation and good stability. It is also suitable for the detection of various gaseous species. However, detection performance is strongly affected by ion collection efficiency, which depends on the distribution of the electric field in the detection region. A stable and uniform electric field is essential for efficient ion transport to the collector electrode. It can reduce ion loss and improve detection sensitivity and quantitative accuracy. In this study, a bipolar bias electric field optimization method was proposed for ionization-based detection, and applied to a typical pulsed discharge ionization detection system. The purpose was to improve ion transport and signal collection efficiency. Two auxiliary bias electrodes were introduced into the ion transport region. Their voltages were independently controlled to regulate the axial electric potential distribution. This configuration allows the electric field to be adjusted at different stages of ion transport. It can enhance directional ion migration and reduce ion losses caused by diffusion and recombination. The influence of the bipolar bias electric field was first investigated using COMSOL Multiphysics. A two-dimensional axisymmetric electrostatic model was established according to the actual detection system. Appropriate electrical boundary conditions were applied to the electrode surfaces and model boundaries. The primary discharge conditions were kept constant during the simulation. The voltages of the two bias electrodes were varied systematically. The axial electric potential distributions were calculated under different voltage combinations. The calculated potential profiles were compared to evaluate the effect of the bipolar bias on electric-field continuity and ion transport. The simulation results showed that the bipolar bias configuration significantly modified the axial potential distribution. An appropriate combination of the two bias voltages produced a more continuous potential gradient in the ion transport region. This provided a more favorable electric-field environment for directional ion migration toward the collection electrode. Experimental validation was then performed using a 5 μmol/mol methane standard gas. A pulsed discharge ionization detector equipped with two independently controlled bias electrodes was used for the measurements. The carrier gas flow rate and discharge conditions were kept constant throughout the experiments. The two bias voltages were systematically varied within the selected operating range. Baseline current, baseline noise, baseline drift, and methane peak height were recorded for each condition. Each experimental condition was measured three times, and the average values were used for data analysis. The signal-to-noise ratio (SNR) and limit of detection (LOD) were calculated from the measured chromatographic responses and baseline noise. The experimental results were consistent with the simulation results. Increasing the bias voltages improved the axial electric-field distribution and enhanced ion transport toward the collection region. Compared with the no-bias condition and single-bias conditions, the bipolar bias configuration produced stronger detector responses. The optimized operating region was relatively broad. When both bias voltages were within the range of 100-200 V, the detector achieved a low detection limit and a high SNR simultaneously. The lowest detection limit was 2.50 nmol/mol, while the maximum SNR reached 4 004.8. These results demonstrate that the bipolar bias electric field can effectively improve ion transport and collection efficiency. The relatively broad optimal voltage range also makes the system less sensitive to small voltage fluctuations during operation. In summary, the proposed bipolar bias electric field provides an effective approach for improving the performance of pulsed discharge ionization detection systems. The combined simulation and experimental results demonstrate that appropriate electric-field regulation can enhance ion transport and ion collection without changing the fundamental ionization mechanism. The proposed method may provide useful guidance for electric-field optimization in ionization-based gas detection systems.

Key words: ionization detection, trace gas detection, gas chromatography (GC), bipolar bias

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